ABOUT THE CHEMICAL PUMP & CANISTER CABINET

The photoresist pumps and chemical canisters cabinet is an accessory designed for storing canisters and pumps in a stainless steel cabinet. It supplies chemical solvents, developer liquids, and photoresists to track systems. The accessory is located separately from the track system and features a pulling tray with a locker for easy chemical filling, maintenance, and safety. It includes leakage sensors, relief valves, and pressure gauges to protect users from chemical exposure, with an alarm and interlock system for leak detection.