Single Track for R&D and Lab
(1 Coater, 1 Developer)

The PCT-200CRS (1C-1D) designed with a focus on cost and footprint savings for R&D and lab environments. It features 2 spin stations within a compact footprint, making it ideal for space-constrained settings. Despite its smaller size, the system offers a full range of modules and process capabilities, including single shuttle robot arms for the single track.

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This system is perfectly suited for R&D and lab work, providing footprint reduction, user-friendly operation, extensive process storage, various interface tools, easy maintenance, and conservation of chemicals and energy efficiency.

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In addition, we offer other great tool sets that have compact designs such as scrubbers, lift-off systems, film frame cleaners, mask cleaners, and stand-alone coaters, developers, or hot plates.