Single Track for R&D and Lab
(1 Coater, 1 Developer)

The PCT-150CRS (1C-1D) is designed to optimize footprint and cost savings for R&D and lab environments. Featuring 2 spin stations within a compact footprint, it offers ample space for R&D and lab activities while maintaining full process capabilities with a variety of modules.

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Equipped with a single shuttle robot arm for the single track, this system is tailored for R&D and lab works, emphasizing footprint reduction, user-friendliness, extensive process storage, and a range of interface tools. Additionally, it ensures easy maintenance and promotes conservation of chemicals and energy efficiency.

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Built on the compact design of the PCT-150CRS platform, we also offer complementary tool sets including scrubbers, lift-offs, film frame cleaners, mask cleaners, and stand-alone coaters, developers, or hot plates.