Dual Tracks for Standard Production
(1 Coater, 1 Developer)

The PCT-150CRS (1C-1D) is designed with a focus on cost reduction for standard production. It features 2 spin stations within the same footprint as a dual tracks system. The system includes dual shuttle robot arms for each track, single or dual PCs, and 2 controllers, all operating independently.

​

This PCT-150CRS tool is configured for customers requiring a tool for medium workload production while aiming to reduce costs. It is also versatile, allowing for the development of specific processes and the addition of more modules for new products in the future.