PCT 100 RRE is the photo-lithography tool base on Random Robot Enhancement. As its name implies, this series of product now can offer their customers the highest throughput with the extraordinary fast and high precision of robot arm. Being designed with an attractive tidy, so PCT-100 RRE brings a smallest footprint and is costly.

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 The spin modules can adapt to almost the photo-lithography processes as LED, MEMs, ICs, .... With the high precision and high acceleration of the spin servo motor; hence, a perfect uniformity and a desired thickness can be achieved easily on the wafer.

Temperature modules controlled by a PID temperature controller adopt an excellent uniformity on chuck surface.

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Its controllers are combined between PC and PLC that make the machine running continuously and reliably. HMI devices are based on PC, so the User Interface is friendly and easy to use. All the movements can be taught and saved into memory in maintenance mode.