Dual Tracks for Mass Production (2 Coaters, 2 Developers)

The PCT-150CRS (2C-2D) is our most advanced coater and developer tool set for photolithography processing, designed for high productivity in mass production. Key features include:

• Dual wafer size auto change

• Shuttle robot arm with dual or triple end-effector handlers

• Stacked up modules

• Dual PCs and monitors

• PLC controllers

• SECs/GEM compliance

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The PCT-150CRS system emphasizes high reliability, high throughput, footprint reduction, user-friendliness, and flexible process flow. It also supports various interface tools and management systems, ensuring compliance with SECs/GEM standards. Additionally, the system is designed for easy maintenance, chemical conservation, and energy efficiency.