The PCT-150RRE Dual Tracks System introduces a novel concept design featuring a linear track system with dual random robot arms, each equipped with two end-effectors. These arms move along the modules situated at the front and rear of each track. This innovative design enhances versatility, making it suitable for a wide range of wafer products in manufacturing.

 

Key features include flexible process capabilities, re-configurable modules, automatic changeability for dual wafer sizes, process monitoring, and operator convenience. The system also offers special features for process editing and database sharing through export/import functionalities.

 

The PCT-150RRE system platform is engineered for high reliability, high throughput, footprint reduction, user-friendliness, and flexible process flows. It supports various interface tools and complies with SECs/GEM management standards. Additionally, it ensures easy maintenance and promotes chemical conservation and energy efficiency.