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PCT-200

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ABOUT PCT-200

  • Linear track system: Coater and Developer

  • Designed on 150mm-200mm platform wafer size

  • Application using embedded software with Graphic User Interface (GUI).

  • System featured with a generic nerve-networking using Ethernet.

  • Providing user interface that graphically shows the current status of the whole system.

  • Teach mode, Calibrations, and Components exercise functions

  • Providing process performance up to sub-micron process.

  • High performance and low cost of ownership

  • Enhance and upgrade on customer side available

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