Linear track system: Coater and Developer

Designed on 150mm-200mm platform wafer size

Application using embedded software with Graphic User Interface (GUI).

System featured with a generic nerve-networking using Ethernet.

Providing user interface that graphically shows the current status of the whole system.

Teach mode, Calibrations, and Components exercise functions

Providing process performance up to sub-micron process.

High performance and low cost of ownership

Enhance and upgrade on customer side available